Up to now, Huawei Kirin 990 5G is the only commercial chip with EUV ultra-UV lithography, made by TSMC 7nm EUV process, while Qualcomm’s just released SnapDragon765/SnapDragon765G uses Samsung’s 7nmUV E6G. EUV technology can land commercial, behind the Dutch giant ASML (Asmai), the entire EUV photolithography machine market has been monopolized by his family, the current 7nm process node so, the future of 5nm, 3mm nodes will be so. Recently, ASML released some interesting data about EUV.
In fact, as early as 2013, ASML EUV photolithography machine was put into use, but the first few years have been the nature of testing, trial production, the cumulative output of 300 mm wafers until 2017 only reached 1.1 million pieces, in 2018 and produced 900,000 pieces, 2019 has reached a cumulative total of 4.5 million pieces, The compound annual growth rate from 2016 to the present is as high as 95%.
In fact, the world has deployed and put into operation eUV lithography machine is not many, until 2016 only 10 district, 2018 increased 17 units, the first half of 2019 increased 11, a total of 38.
Currently put into production of The EUV photolithography machine models are NXE:3400B, the second half of the year will usher in a new version of the NXE: 3400C, can produce up to 175 300 mm wafers per hour – in 2014, but the intelligent production of about 10 pieces per hour.
The nxE:3400C is the most modular design, more convenient maintenance, the average service time will be reduced from 48 hours to 8-10 hours, support 7nm, 5nm.
ASML’s next-generation EUV photolithography machine will be the EXE:5000 series, for TSMC 3nm, Intel 5nm process, the introduction of High NA (High Numerical Aperture) lens, from 0.33 to 0.55, to match the more advanced manufacturing process, is expected to be available in 2023.
As for how expensive this EUV lithographer is, Samsung is said to have recently ordered 15 units with a total value of 3 trillion won, equivalent to about 18 billion yuan, then one is 1.2 billion yuan, the most expensive semiconductor equipment in history.